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CIS System
- Specialized in CIS Process
- Auto Conversion ( 8", 12" ) Function
- Optimized Software
- SECS / GEM Communication
Model Name
DAVID
300
Substrate Size
- 8-Inch, 12-Inch
Substrate Material
- Wafer, Ring-frame
System Configuration
- 2-Spin, 3-Spin, 4-Spin,5-Spin
Demension
- W3445 x D2170 x H1800
Cassette Station
- Uni-Cassette : 2ea
- Auto-Conversion
Module
Transfer Unit
- 2-Arm Vac Robot sith mapping sensor
- 5-Axis ( R1,R2,T,Z,X )
Coater Module
- Stream Nozzle, Max 300rpm
- Special PR
Remover Module
- Cleaning Nozzle, Removing Nozzle
Max 3000rpm
Cleaning Module
- Cleaning Nozzle, Max 3000rpm
Align Module
-Align within 1mm
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